JPH0220267U - - Google Patents
Info
- Publication number
- JPH0220267U JPH0220267U JP9815288U JP9815288U JPH0220267U JP H0220267 U JPH0220267 U JP H0220267U JP 9815288 U JP9815288 U JP 9815288U JP 9815288 U JP9815288 U JP 9815288U JP H0220267 U JPH0220267 U JP H0220267U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ions
- implantation apparatus
- ion implantation
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 4
- 238000005468 ion implantation Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815288U JPH0220267U (en]) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815288U JPH0220267U (en]) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220267U true JPH0220267U (en]) | 1990-02-09 |
Family
ID=31324160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9815288U Pending JPH0220267U (en]) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220267U (en]) |
-
1988
- 1988-07-25 JP JP9815288U patent/JPH0220267U/ja active Pending